Shenzhen three and wave of Electrical and Mechanical Technology Co., Ltd

400 0061 1152CN
Atmospheric Pressure
  • 5L vertical stainless steel RF matching integrated vacuum plasma cleaning machin

5L vertical stainless steel RF matching integrated vacuum plasma cleaning machin

Category:Atmospheric Pressure

Introduction: 5L vertical stainless steel RF matching integrated vacuum plasma cleaning machine (high version)

Service Hotline:400 0061 1152

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Features

PT-5ST

Cavity material: stainless steel surface treatment

Power supply: AC220V

Working current: The working current of the whole machine is not more than 1.2A (excluding vacuum pump)

RF power supply: 0-300W adjustable (RF matching integrated)

RF frequency: 13.56MHz

Frequency offset: less than 0.2KHz

Characteristic impedance: 50 ohms, automatic matching

Vacuum degree: 1pa-30Pa (high vacuum gauge displays vacuum in real time)

Number of gas channels: Dual gas input (ultra-high precision electronic flowmeter)

Gas flow rate: 10-300ml/min (adjustable)

Process control: PLC man-machine interface automatic and manual mode

Cleaning time: 1-99999 seconds adjustable

Power size 10%-100% adjustable

Inner cavity size Φ150×270Lmm 5L

Dimensions: 560 × 540 × 1250mm L × W × H

Vacuum pump: 2XZ-4 (pumping speed 2L/S)

Vacuum chamber temperature: less than 30 ° C

Cooling method: forced air cooling

Features

PT-5ST

Cavity material: stainless steel surface treatment

Power supply: AC220V

Working current: The working current of the whole machine is not more than 1.2A (excluding vacuum pump)

RF power supply: 0-300W adjustable (RF matching integrated)

RF frequency: 13.56MHz

Frequency offset: less than 0.2KHz

Characteristic impedance: 50 ohms, automatic matching

Vacuum degree: 1pa-30Pa (high vacuum gauge displays vacuum in real time)

Number of gas channels: Dual gas input (ultra-high precision electronic flowmeter)

Gas flow rate: 10-300ml/min (adjustable)

Process control: PLC man-machine interface automatic and manual mode

Cleaning time: 1-99999 seconds adjustable

Power size 10%-100% adjustable

Inner cavity size Φ150×270Lmm 5L

Dimensions: 560 × 540 × 1250mm L × W × H

Vacuum pump: 2XZ-4 (pumping speed 2L/S)

Vacuum chamber temperature: less than 30 ° C

Cooling method: forced air cooling

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